S.B. Nesterov, G.N. Ivanova, Е.V. Belyaeva S.A.Vekshinskiy SRI for Vacuum Equipment OJSC, 117105, Moscow,Nagorniy proezd, 7. sbnesterov@niivt.ru

VacuumTechExpo exhibition was established in 2005 with a view to enhance the investment and business climate in the field of vacuum equipment, to strengthen the innovative component in the activities of companies specialized in vacuum equipment, to solve the staff problem and to expand international relations.

MVK International Exhibition Company, part of the ITE Group, was the Exhibition organiser. Martyshov S.A., Vorobyev M.V., Zhukov D.N., Lomunova N.Y. were the Exhibition Directors in different years. OJSC S.A.Vekshinskiy SRI for Vacuum Equipment has been the Exhibition co-organiser and the organiser of the Business Programme for all ten years. Nesterov S.B., Professor, the Deputy Chairman of Russian Scientific and Technical Vacuum Society has contributed significantly to formation of the ideology and the Business Programme.

The Exhibition operated with the support of Russian Scientific and Technical Vacuum Society, Moscow Chamber of Commerce and Industry, Bauman Moscow State Technical University, Moscow Committee on Science and Technology and Russian Union of Industrialists and Entrepreneurs.

Polema JSC was the Exhibition Primary Sponsor at the initial stage. Then it was Intec Analitica JSC and Vacuummash JSC.

A major contribution to the Exhibition formation was made by Professor Arkharov A.M., a Laureate of the State Prize of USSR, Russia, a Laureate of prizes of RF Government; Popovich M.L., Class 1 Test Pilot, a Hero of Socialist Labor, the holder of World Record 101; Finogeev V.N., a Laureate of the Lenin Prize and the State Prize, a Hero of Socialist Labor; Russkikh A.Y., the Deputy Chairman of the State Duma Committee; RAS Academicians Bugaev A.S., Rebrov А.К., Sigov A.S. and many other persons.

Ten exhibition have passed. 182 international and domestic companies and manufacturers of vacuum equipment from Austria, Belarus, Great Britain, Germany, Israel, China, Korea, Latvia, Liechtenstein, Slovakia, Slovenia, USA, Ukraine, France, Switzerland and Japan took part in them.

The main objectives of the Exhibition: demonstration of unique achievements in the field of vacuum equipment, materials and technologies as well as their market promotion; establishment of business contacts, attraction of investments; rendering assistance in formation and implementation of national and regional programs in this field.

International Scientific and Practical Conference "Vacuum machines, materials and technologies" worked in parallel. Representatives from Belarus, Germany, China, Korea, Liechtenstein, Mongolia, Netherlands, Russia, Romania and Ukraine took part in the Conference. Over 500 reports have been published for 10 years. The number of authors is about 700. All these years the Exhibition has worked under the slogan "Vacuum equipment, cryogenic equipment and nanotechnology: three pillars the hi-tech world repose on". This slogan is fixed directly in the names of the Scientific and Technical Conference sections: Vacuum machines and aerospace complex; Vacuum technologies and equipment; New technologies for thin-film formation. Methods and researches. Process equipment; Nanotechnology and biotechnology; Cryogenic and cryovacuum machines. Arkharov A.M., Burmistrov A.V., Gorin A.V., Lunin A.I., Rozanov L.N. and Sleptsov V.V. were the section heads.

Representatives from Moscow, Moscow region (Balashikha, Dubna, Zhukovskiy, Zelenograd, Istra, Obolensk, Protvino, Reutov, Tomilino, Fryazino, Khimki, Chernogolovka, Elektrogorsk), Saint-Petersburg, Siberia (Zheleznogorsk, Iskitim, Novosibirsk, Omsk, Tomsk), Ural (Yekaterinburg, Perm, Chelyabinsk), Povolzhye (Yoshkar-Ola, Kazan, Samara, Rybinsk, Ulyanovsk), Belgorod, Voronezh, Kaliningrad, Makhachkala, Pskov, Saransk, Tambov and Tula have participated in the works of the Exhibition and the Conference for 10 years.

The Exhibition visitors are representatives of customers of vacuum equipment for production or research work. They represent 47 regions of Russia and 15 countries worldwide. The largest number of visitors represents Moscow and Moscow region, Saint-Petersburg and Leningrad region, Kaluga region, Nizhny Novgorod region, Yaroslavl region and the Republic of Tatarstan.

Competition "The best innovative product in high-technology industry" is conducted in the scope of the Exhibition. The Competition is designed to popularize advanced developments of Russian companies and to facilitate their promotion and further application in production, awarding of young scientists for the best presentations, awarding of distinguished representatives of science, education and industry by Academician Vekshinskiy S.A Medal, invitation of scientists and experts from neighboring areas of knowledge with reports, conduct of specialized seminars, work on formation of unified terminology, standardization, publication of the Exhibition results in various specialized magazines, creation and constant updating of annotated bibliography of publications on vacuum equipment and technology, attraction of students from Moscow higher education institution to the Exhibition and the Conference, their summarizing the results of visiting, communication with foreign exhibitors and visits to companies represented by them as well as perpetuating the memory of scientists gone.

The winners of Competition "The best innovative product in high-technology industry" in the period 2010-2014

2010

• HSR AG Balzers, Liechtenstein. For construction of high-performance cryopump.
• Izovac LLC, Republic of Belarus. For construction of high-performance optical elements and "Micron 7" quartz film thickness gage.
• Ferri Vatt CJSC, Kazan. For construction of high-performance vacuum process equipment.
• Research Institute of Precision Machine Manufacturing OJSC, Zelenograd. For construction of high-performance automated small-size vacuum ion-reactive etcher.
• S.A.Vekshinskiy SRI for Vacuum Equipment FSUE, Moscow. For development of high-performance bismuth telluride based thermoelectric materials creation technology.

2011

• Intec Analitica CJSC, Saint-Petersburg. For attraction of innovative vacuum equipment to domestic market.
• ESTO Vacuum LLC, Zelenograd. For development of special process equipment.
• VTT, Republic of Belarus For development of vacuum process equipment.
• Kurt J.Lesker company Ltd, Great Britain. For development of high-performance vacuum systems.
• Izmeritel Plant, Saint-Petersburg. For construction of domestic leak detectors.

2012

• Bauman Moscow State Technical University, Moscow For construction of a laboratory unit for application of coatings using particle-beam methods.
• VIC, USA. For construction of touch-sensitive leak detectors.
• Izovac LLC, Republic of Belarus. For development of special process equipment ORTUS.
• SHI Cryogenics of Europe Limited, Great Britain. For construction of cryogenic equipment.
• ODEM Scientific application, Israel. For construction of analytical equipment.

2013

• Gamma Vacuum, USA. For development of a series of magnetic sputter-ion pumps designed for creation of high and ultrahigh vacuum.
• OTTOM Trading House, Ukraine. For construction of vacuum electric furnaces designed for soldering parts made of high alloy steels.
• Ferri Vatt CJSC, Kazan. For construction of degassing and refractory metal monocrystal production unit.
• Tomsk Polytechnic University, Tomsk. For development of ion-plasma unit for deposition of radio-reflecting coating on large-size reflectors "KO MKR".
• Dienerelectronic GmbH & Co KG, Germany. For construction of ultra small vacuum automatic plasma unit "YOSTO".
• FEP Fraunhofer-Institut fur Elektronstrahl-und Plasmatechnik, Germany. For development of stationary sputtering dual-ring magnetron.
• OKBM-TO LLC, Kaliningrad For development of automated pumping station POA.

2014

• Vacuummash OJSC, Kazan. For development of vacuum booster oil-vapor pump.
• ESTO Vacuum LLC. For construction of magnetron film sputtering unit.
• Laboratory of Vacuum Technology, Ltd. For a package of vacuum-plasma technologies and equipment for enhancement of surface properties of products of various production branches.
• Cryotrade LLC. For construction of sputtering deposition system.
• ВОС Edwards, Great Britain. For construction of screw-type pumps.
• VACOM GmbH, Germany. For construction of vacuum sight glasses High Precision Optic Series.
• MSH Techno LLC, Moscow. For construction of system for definition of mechanical properties of construction materials in vacuum and gas media at temperatures up to 20000С.
• Buhler Leybold Optics, Germany. For construction of high-vacuum magnetron sputtering units.
• MELZ-Invest CJSC, Moscow. For construction of a unit designed for pumping out three special-purpose products of different size and its further filling with ultra-clean gas mix under excessive pressure.
• National Research Tomsk Polytechnic University, Tomsk. For construction of a package of vacuum-plasma technologies and equipment for enhancement of surface properties of products of various production branches.

2015

• VAT Vakuumventile AG Company. For high-vacuum leak valve with step motor and integrated controller VAT Series 59 DN16CF.
• Agilent Technologies. For turbomolecular pump twistorr 84fs.
• National Research Tomsk Polytechnic University. For unit designated for sample testing for integrated effect of operating factors in space conditions.
• Research Institute of Precision Machine Manufacturing OJSC. For MVU TM Izofaz-03 unit.
• Atlas Copco JSC. For screw-type vacuum pump with variable-speed drive GHS-VSD+.
• Oerlikon Leybold Vacuum. For leak detector PHOENIX L300i.
• Laboratory of Vacuum Technology, Ltd. For vacuum coater Nika 2013 MN.
• NITTIN SPE LLC For Elevator-Type Electrical Furnaces SEVF-3.3/11,5-IZMb-NITTIN, SEVF-5.5/11,5-IZMb-NITTIN, SEVF-3.3/11,5-IZMf-NITTIN, SEVF-5.5/11,5-IZMf-NITTIN for oil quenching.
• Vacuum Systems and Electronics LLC. For desktop magnetron sputtering unit for application of metal and dielectric coatings VSE-PVD-DESK-PRO.
• SemiTEq JSC. For multipurpose compact molecular-beam epitaxy system STE75.

Materials dedicated to the memory of the following scientists have been published in the Conference works: Lomonosov M.V., Mendeleev D.I., Vekshinskiy S.A., Kogan V.S., Brodyanskiy V.M., Kapustin N.F., Ivanovskiy G.F. A stone in commemoration of Mendeleev D.I. flight on air balloon from Klin has been fixed in Spas-Ugol village. A memorial tablet has been fixed in Pskov on the house where Vekshinskiy S.A. was born in 1896.

The professional associations of other countries taking part in the Exhibition Business Programme are specified below: Japan Vacuum Industrial Association, Chinese Vacuum Equipment Manufacturers Association, European Society of Thin Films, American Vacuum Society.

The specialized seminars organized in the scope of the Business Programme are as follows: Vacuum technologies and aerospace complex; Functional coatings for optics, sensorics and electronics (Fraunhofer Institut), stand presentations of particular organizations.

Young scientists from the following organizations have taken the most active part in the scientific and technical conferences: OJSC S.A.Vekshinskiy SRI for Vacuum Equipment, Bauman Moscow State Technical University, St.Petersburg Sate Polytechnic University, Moscow Power Engineering Institute, MATI - Russian State Technological University named after K.E.Tsiolkovsky.

Organizations that take the most active part in the Exhibition work

The following companies took part in the Exhibition ten times: OJSC S.A.Vekshinskiy SRI for Vacuum Equipment, Cryogenic and Vacuum Systems LLC, Ferri Vatt CJSC, Izovac LLC, Vacuummash OJSC, Megatechnika, Moscow Power Engineering Institute, CCS Services LLC, BLM Synergie, GNB Corporation, Vacuum Service LLC; 9 times: Intec Analitica CJSC, Tako Line LLC, NIITM OJSC, VTT LLC, Glynwed Russia, Friatec AG Ltd., 8 times: Bauman Moscow State Technical University, Actan LLC, Esto Vacuum LLC, Gertner Service GmbH.

Organization and conduct of vacuum tours to enterprises in Europe

Intec Analitica JSC has organized seven vacuum tours for the leading Russian experts in the field of vacuum equipment and technology to the leading European enterprises specialized in production of vacuum equipment such as HSR (Balzers, Liechtenstein), VAT (Haag, Switzerland), Edwards (Lutin, Czech Republic), Edwards Service Center (Brno, Czech Republic). The tour participants have completed training and received certificates.

The list of organizations exhibited at VacuumTechExpo in the period of 2006-2015

Industrial Technical Vacuum CJSC, Actan LLC, Aja International Inc., Alvest Vacuum LLC, Almir LLC, Art-Premium LLC, Atlas Copco CJSC, Argonavt-Temp NPF LLC, Busch Vacuum Russia LLC, Mesh Plus LLC, Volo NPP LLC, Dana Engineering LLC, Esto NPP CJSC, Zenko Plasma CJSC, Intec Analitica CJSC, Iontech-Nano LLC, East Vacuum, Quartz OJSC, Cryogenic Equipment NTK, Cryoprom PKF LLC, Cryosystems LLC (Cryogenic Vacuum Systems from 2010), Cryogenmontazh OJSC, Cryomash-BZKM LLC, Cryovac Service LLC, Cryotrade LLC, Labtest LLC, Laboratory of Vacuum Technology, Ltd., Monitoring NPO LLC, NIR CJSC, OKBM TO LLC, Pyramid Vacuum LLC, Ferri Vatt CJSC, Izovac LLC, Optika FSUE, Saturn NPO, Modern Technologies and Cryogenic Systems, NASOSENERGOMASH Pump & Power Engineering Works Sumy OJSC, Smorgon Optical Machine Building Plant OJSC, Intrade LLC, Interprom LLC, Inficon Inc., Izmeritel Plant OJSC, Camozzi Pneumatics LLC, Elan-Praktik RPC LLC, Vacuummash OJSC, Vacuum Service LLC, Vacuum Shop LLC, Vacuumprom LLC, Vacuum Systems LLC, Vactron LLC, Vacuum Systems and Electronics LLC, Vacuumtech LLC, MSH Techno, Applied Electronics LLC, TVS LLC, Twin Trading Company CJSC, TechnoSystemTrade LLC, Progress NPF, Industrial Monitoring and Control, RIAT, S-Instruments, Megatechnika, Megapaskal LLC, Tako Line LLC, Univac-N, Pskovtekhgaz, Forvak, Med-Technology NPO CJSC at RAMS, Millab LLC, Monitoring Valce and Fiting LLC, Moscow Vacuum Furnace Plant (MEVZ) LLC, Melz-Invest CJSC, Advanced Engineering, Ekvat NPP LLC, Ecotechnology, Exiton Analytic, Eltochpribor LLC, Elektroprivod NPF LLC, Electronic Service CJSC, Eltech NPP CJSC, Electrotechnology CJSC, Energoavangard, ESTO-Vacuum LLC, Erstvak LLC, Agregat NPO LLC, Prizma LLC, Gydromekh LLC, VNIIETO Group LLC, NIITM OJSC, J L S Chemical LLC, UKM Sintez LLC, FSUE GSC Institute for High-Energy Physics, SDB REI RAS FSUE (Special Design Bureau of Radiotechnics and Electronics Institute), VTT LLC, Avtogenmash TM OJSC, Labyrinth LLC, GraphitEl – Moscow Electrode Plant LLC, ЗМ Engineering LLC, Iontech-S LLC, Micos LLC, OTTOM Trading House LLC, Terla LLC, Electrade-M CJSC, Eltech SPb CJSC, PVA TePla AG, NITTIN LLC, Bauman Moscow State Technical University, MIEI, MATI - Russian State Technological University named after K.E.Tsiolkovsky, S.A.Vekshinskiy SRI for Vacuum Equipment OJSC, Moscow Power Engineering Institute, Lomonosov Moscow State University, 2010 – Physics Department, Kaskad STC, Moscow State University of Instrument Engineering and Informatics, National Research Tomsk Polytechnic University NR TPU, RVS (Russian Vacuum Society), Japan Vacuum Industrial Association, Kurbat Global LLC, АКМ Engineering, Polema JSC, Sigm Plus Engineering LLC, CRDEMET R&D JSC, Splav-М CJSC, CCS Service LLC, Gertner Service GmbH (Germany), CCS services SA representative office, Pfeiffer Vacuum, Anhui WanRui, BLM Synergie, Guandong Foshan Pump Factory, GNB Corporation (USA), Precision Plus Vacuum Parts, Leybold Vacuum GmbH (Germany), Leybold Optics – Buehler, SCT Ceramics, ELMO Rietschle, Kurt J. Lesker Co., LTD (Great Britain), ISLAND Scientific, LTD, LBM VACUUM, Ulvac Inc. (Japan), Ulvac LLC, Prevac SP. LTD, VAT Vakuumventile AG, BOC Edwards (SPb), SMC Pneumatic LLC, Glynwed Russia, Friatec AG Ltd. (Moscow), Oerlikon Leybold Vacuum GmbH/Gertner Service, Buerkert (Austria), Creavac – Creative Vakuumbeschichtung GmbH, DTF Technnology, Sidrabe, Inc. (Latvia), Ferrotec Europe GmbH (Germany), Fraunhofer FEP (Germany), Temescal part of Ferrotec, HSR AG (Liechtenstein), Korea Vac-Tec Co.,Ltd, Oxford Instruments Plasma Technology PLC, Shengong, Siegert Thinfilm Technology GmbH, Solberg International SK, Ltd (Slovakia), Solberg (ERA SPC), Sumitomo (SHI) cryogenics of Europe, Ltd, Shenyang Geowell Applied Technology Co.Ltd., Odem Ltd (representative in Russia: Vacuum Systems LLC (Moscow), VACOM Vakuum Komponenten & Messtechnik GmbH, Vacree Technologies Co. LTD, Vacuum Instrument Corporation (VIC), VG Scienta, VIC FERRO FLUIDS CO LTD, VON ARDENNE, China Vacuum Equipment Association , KYKY Technology Co., Ltd, Ltd (China), Lewvac, LLP (Great Britain), Vacuum Research Corporation (USA), Value Mechanical & Electrical Products (China), VIC FERRO FLUIDICS CO.LTD, ZHEJIANG VALE MACHANICAL, Zibo Vacuum Equipment Plant, Zibo Three Up, High Tech Metal Seals, Nor-Cal Europe Ltd., Scia Systems GmbH.

VacuumTechExpo for 10 years of its existence has become the main event of the year in the field of domestic vacuum equipment and technology.

Further development of vacuum equipment in Russia is determined mainly by innovation studies. Our country shall hold the positions of the industrialized State. And in that context the issues of development of knowledge intensive industries with high value added level have a special place in social and economic priorities of our country. Vacuum equipment, cryogenic equipment and nanotechnology fall into such knowledge intensive industries.

Over 300 companies from 20 counties worldwide have taken part in the Exhibition and the Business Programme for 10 years including: Austria, Belarus, Great Britain, Germany, Israel, Korea, China, Latvia, Liechtenstein, Mongolia, Netherlands, Russia, Romania, Slovakia, Slovenia, USA, Ukraine, France, Switzerland and Japan.

There is no doubt that VacuumTechExpo will promote development of production and economic relations, establishment of new business and personal contacts and exchange of scientific and technical information.